TYR made the boride sputteirng targets material with seasoned experience, we supply the targets material include metal targets, alloy targets and ceramic target (oxide target, boride target, carbide target, nitride target, fluoride target, sulfide target, silicide target, Antimonide target, Selenide target, Telluride target)
the product info of Tantalum silicide target as following:
composition: Ta5Si2, TaSi2, Ta3Si5, Ti5Si3, TiSi2, Ti3SiC2 e.t.c, also can be made per requested.
Purity: 99.5%
Shape: plate, foil, sheet, disc, rod, tube, wire, crucible.
Size:
Diameter: 355.6mm (14") max.
Single piece Size: Length: <254mm, Width: <127mm, Thickness: >1mm, if larger size than this, we can do it as tiles joint by 45 degree or 90 degree.
we also supply other silicide sputtering targets and evaporation materials at good quality, like ReSi2 target, Hafnium Silicide, HfSi2 targets, Iron Silicide, FeSi2 targets, Molybdenum Silicide, MoSi2 targets, MoSi2-WSi2 targets, Niobium Silicide, NbSi2 targets, Vanadium Silicide, VSi2, V3Si targets, Nickel Silicide, NiSi2 targets,Tungsten Silicide, WSi2 targets, Zirconium Silicide, ZrSi2 targets e.t.c
most of those material can be made in the shape as granules, chunks, pellets, tablets, apply to thin film coating materials
Most of the material can be offered in powder, lump, pellet, rod and sputtering target form and made from Hot press or Cold press or sinter.
we have only listed the more popular material. Please feel free contact us with any special requirements at any times, we will try to get back for you ASAP.
