Fluoride ceramic sputtering target




Diameter: 355.6mm (14") max. 

Single piece Size: Length: <500mm, Width: <250mm, Thickness: >1mm, 

if larger size than this, we can do it as tiles joint by 45 degree or 90 degree.

 Shape: discs, plate, rod, tube, sheet, Delta, and per drawing 

Made sputtering targets method: 

Hot pressing (HP), hot/cold isostatic pressing (HIP, CIP), and vacuum melting, vacuum sintering


Aluminum Fluoride  AlF3 99.9%

Ytterbium Fluoride YbF3 99.9%

Yttrium Fluoride YF3 99.9%

Barium Fluoride BaF2 99.99%

Magnesium Fluoride MgF2 99.95%

Nodium Fluoride NaF 99.99%


We have only listed the more popular material. Please feel free contact us with any special requirements at any times, we will try to get back for you ASAP.



offering sputtering targets, evaporation material, rare earth metal, rare earth oxide, chemistry reagent


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